Abstract

The magnetron sputtering system with reactive oxygen plasma assisting for deposition of Ti x Zr1- x O2 nanocomposite coatings by sputtering a single Ti-Zr target and the results of study of the stability of these coatings to the action of high-power laser radiation are presented. The periodically repeated sequential processes of applying sputtered material onto a substrate and oxidation of the deposited material have been realized for obtaining the optical coating with resistance to the 960 W/cm2 laser radiation.

Details

Title
Magnetron sputtering system with reactive plasma assisting for deposition of Ti x Zr1 -x O2 coating resistant to laser radiation
Author
Volpian, O D 1 ; Krikunov, A I 2 ; Kuzmichev, A I 3 ; Zharikova, E S 4 ; Churikov, D V 2 

1  Fotron-Auto Scientific Production Complex, Ltd., Moscow, 115191, Russia; Scientific and Technological Centre of Unique Instrumentation of Russian Academy of Science, Moscow, 117342, Russia 
2  Scientific and Technological Centre of Unique Instrumentation of Russian Academy of Science, Moscow, 117342, Russia 
3  Igor Sikorsky Kyiv Polytechnic Institute, Kiev, 03056, Ukraine 
4  M F Stelmah Research Institute “Polyus”, Moscow, 117342, Russia 
Publication year
2019
Publication date
Nov 2019
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
DOI
https://doi.org/10.1088/1742-6596/1396/1/012044
ProQuest document ID
2568300662
Copyright
© 2019. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.