Full Text

Turn on search term navigation

© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.

Abstract

In this paper, we report experimental findings on a 4H-SiC-based p-i-n photodiode. The fabricated device has a p-type region formed by ion-implantation of aluminum (Al) in a nitrogen doped n-type layer. The dark reverse current density reaches 38.6 nA/cm2 at −10 V, while the photocurrent density rises to 6.36 µA/cm2 at the same bias under λ = 315 nm ultraviolet (UV) radiation with an incident optical power density of 29.83 μW/cm2. At the wavelength of λ = 285 nm, the responsivity is maximum, 0.168 A/W at 0 V, and 0.204 A/W at −30 V, leading to an external quantum efficiency of 72.7 and 88.3%, respectively. Moreover, the long-term stability of the photodiode performances has been examined after exposing the device under test to several cycles of thermal stress, from 150 up to 350 °C and vice versa. The achieved results prove that the examined high-efficiency UV photodiode also has a stable responsivity if subjected to high temperature variations. The proposed device is fully compatible with the conventional production process of 4H-SiC components.

Details

Title
An Efficient 4H-SiC Photodiode for UV Sensing Applications
Author
Megherbi, Mohamed L 1 ; Bencherif, Hichem 2   VIAFID ORCID Logo  ; Dehimi, Lakhdar 1 ; Mallemace, Elisa D 3 ; Rao, Sandro 3   VIAFID ORCID Logo  ; Pezzimenti, Fortunato 3 ; Della Corte, Francesco G 4   VIAFID ORCID Logo 

 LMSM—Laboratory of Metallic and Semiconducting Materials, University of Biskra, Biskra 07000, Algeria; [email protected] (M.L.M.); [email protected] (L.D.) 
 LAAAS—Laboratory, Mostefa Benboulaid University, Batna 05000, Algeria; [email protected] 
 Department DIIES, Mediterranea University, 89124 Reggio Calabria, Italy; [email protected] (E.D.M.); [email protected] (F.P.) 
 Department DIETI, University of Naples Federico II, 80125 Naples, Italy; [email protected] 
First page
2517
Publication year
2021
Publication date
2021
Publisher
MDPI AG
e-ISSN
20799292
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2584348227
Copyright
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.