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Abstract
We present mathematical model of nanowhisker growth at the conductor surface in the vacuum chamber ofscanning electron microscope under focused electron beam impact. Carbon ions with positive charge come outfrom chamber surface and are captured by electron beam field. Ions move along electron beam and subside atnanowhisker surface. This process provides nanowhisker growth. In that model electrical field and beampotential are approximated by electrical field and potential of uniformly charged wire. For that simplificationVlasov equation is written, that gives equation of nanowhisker surface movement. By numerical methods wesimulated and visualized the process of nanowhisker growth. Computing program builds dynamic grid, whichsimulates growing whisker – dynamic growth in real time. Obtained results go well with experimental data.
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