Silicon-based vacuum microelectronic devices fabricated by surface micromachining
Mei, Qi.
University of Minnesota ProQuest Dissertations & Theses, 1996. 9700958.
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
This is a short preview of the document. Your library or institution may give you access to the complete full text for this document in ProQuest.
Alternatively, you can purchase a copy of the complete full text for this document directly from ProQuest using the option below: