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Impacts of TaC Coating on SiC PVT Process Control and Crystal Quality
Fan, Wei; Qu, Hao; Sung Il Chang; Kozak, Brian; Shaffer, Gregory
; et al.
Materials Science Forum; Pfaffikon Vol. 963, (Jul 2019): 22-25.
DOI:10.4028/www.scientific.net/MSF.963.22
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