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Effect of Silicon Conductivity and HF/H2O2 Ratio on Morphology of Silicon Nanostructures Obtained via Metal-Assisted Chemical Etching
Kumar, Jitendra; Ingole, Sarang.
Journal of Electronic Materials; Warrendale Vol. 47, Iss. 2, (Feb 2018): 1583-1588.
DOI:10.1007/s11664-017-5964-0
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